“…A typical cluster tool is a "mini" manufacturing system of interacting subsystems (multiple chambers as manufacturing stations, supported by a material handling system) and can be seen as a quintessential FMS, since each chamber of a cluster tool can be seen as a manufacturing station and different wafer layers produced in these chambers can be seen as different operations performed in the corresponding manufacturing stations, while different wafer types pushed through the tool can be seen as different product types produced in this system. (31,49), (24,42), (11,29), (11,29)] and returns to state 2 [ (4,22), (11,29), (8,26), (1,19), (1,19)] and returns to state 3…”