“…A large set of promising electrical, optical and mechanical properties possessed by SiC makes it a very attractive candidate for high power, high temperature and high frequency applications even under the harsh environmental radiation and chemical conditions [1][2][3][4][5]. Among the various possible crystalline structures of SiC, also known as polytypes, cubic SiC phase (3C-SiC or b-SiC) is of particular importance owing to its high mobility (1000 cm 2 /Vs), electron saturation drift velocity (2.2 · 10 7 cm/s), high resistance to oxidation, high thermal conductivity and low expansion coefficient.…”