Magnification Tolerancing and Compensation for the Lithographic Projection Lens

Weicai, 许伟才 Xu; Wei, 黄玮 Huang; Wang, 杨旺 Yang

doi:10.3788/aos201131.1122003

Cited by 3 publications

(2 citation statements)

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“…Compared with traditional industries, "high-tech" industries pay more attention to high intelligence, high added value, and high efficiency, and put forward higher requirements for the guarantee links of related elements. If traditional enterprises want to transform successfully, the initial investment must be increased, including R&D investment, equipment investment, manpower investment, etc., but it is difficult to obtain a large amount of benefits and recover costs in the short term [14]. At the same time, due to the continuous emergence of new industry models and related "high-tech" industries are constantly penetrating into traditional industries, it is difficult to accurately distinguish industrial boundaries.…”

Section: Difficulties In the Transformation And Upgrading Of The Indu...mentioning

confidence: 99%

Improve the Rapid Development of “High-tech” Industry Based on SWOT Model

Sun

Yibo

2021

E3S Web Conf.

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In order to promote the renewal and development of the capital city and avoid the "low-speed development trap" in the economy, the government proposed to use "high-tech" industries as the driving force to accelerate the construction of a "high-tech" industrial economic structure and increase investment in industrial innovation, so as to better guide and support overall and long-term development of economic and social. This article uses the SWOT analysis model, based on the actual development of Beijing’s industry, deeply analyzes the advantages, disadvantages, opportunities and challenges of the city’s development of "high-tech" industries, and proposes four aspects of countermeasure, such as improving fiscal and tax incentive policies, improving financing methods, optimizing industrial layout, promoting dual-chain integration. Beijing Municipal Government should speed up a reasonable "high-tech" industrial structure, give full play to the role of "high-tech" industries in "improving quality and efficiency" in Beijing's economic development, and then optimize and enhance the core functions of the capital.

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Section: Difficulties In the Transformation And Upgrading Of The Indu...mentioning

confidence: 99%

Improve the Rapid Development of “High-tech” Industry Based on SWOT Model

Sun

Yibo

2021

E3S Web Conf.

View full text Add to dashboard Cite

show abstract

“…They proposed a method for selecting magnification compensation elements to compensate for errors. [7] In 2018, Li et al from the China Academy of Space Science and Engineering conducted optical system alignment experiments on a coaxial threereflection optical system, studying the impact mechanism of surface shape errors and misalignment on optical imaging quality. They used the root mean square error as an indicator to provide a basis for surface shape error compensation.…”

Section: Introductionmentioning

confidence: 99%