2017
DOI: 10.1016/j.vacuum.2017.06.018
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Magnetron sputtering of Si-Al-N nanocomposite coatings on quartz for protection against impacts of high speed microparticles

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Cited by 22 publications
(8 citation statements)
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“…This method is used generally for producing of the I/I nanocomposite coating [41][42][43][44][45][92][93][94][95][96][97], which includes the inorganic matrices and inorganic nanoparticles. For these coatings, PVD method includes the following: laser ablation [98], thermal evaporation [99], ion beam deposition [100], ion implantation [101,102], laser-assisted deposition [103], and atom beam cosputtering technique.…”
Section: Pvd Methodmentioning
confidence: 99%
See 1 more Smart Citation
“…This method is used generally for producing of the I/I nanocomposite coating [41][42][43][44][45][92][93][94][95][96][97], which includes the inorganic matrices and inorganic nanoparticles. For these coatings, PVD method includes the following: laser ablation [98], thermal evaporation [99], ion beam deposition [100], ion implantation [101,102], laser-assisted deposition [103], and atom beam cosputtering technique.…”
Section: Pvd Methodmentioning
confidence: 99%
“…For inorganic matrix, such as metal matrix or alloy matrix, these nanocomposite coatings could be prepared by various methods, including chemical vapor deposition (CVD) (see Figure 3), powder metallurgy, physical vapor deposition (PVD) [41][42][43][44][45], thermal plasma spray [46][47][48], sol-gel [49][50][51][52] (see Figure 1), epitaxial growth [53], cold spray [54][55][56][57][58][59][60][61] (see Figure 2), and electrodeposition [62][63][64][65][66][67]. Metal matrix composite coatings that dispersed a second phase [68,69] have attracted extensive attention owing to unique properties such as oxidation and corrosion resistance [69,70], wear resistance [71,72], and magnetic properties [72].…”
Section: Materials For Matrixmentioning
confidence: 99%
“…Одним из возможных способов защиты стекол иллюминаторов может быть нанесение на их поверхность защитных покрытий, обладающих высокой стойкостью к ударным нагрузкам [1][2][3]. В работе в качестве защиты стеклянных элементов КА от механических повреждений, возникающих при ударном воздействии микрометеороидов, использовали покрытия на основе Re-Zr-N, полученные методом импульсного магнетронного осаждения.…”
Section: Doi: 1017223/978-5-907442-03-0-2021-193unclassified
“…ОПТИЧЕСКИЕ И МЕХАНИЧЕСКИЕ СВОЙСТВА КВАРЦЕВЫХ СТЕКОЛ С НАНОКОМПОЗИТНЫМИ ПОКРЫТИЯМИ НА ОСНОВЕ Al-Si-N 1 Сергеев В.П., 2 Стужук В.В., 1 Овчинников С.В., 1 Калашников М.П., 1 Сергеев О.В., 1 Нейфельд В.В., 1 Параев Ю.Н. 1 Институт физики прочности и материаловедения СО РАН, Томск 2 ПАО «Ракетно-космическая корпорация «Энергия», Королёв…”
Section: Doi: 1017223/978-5-907442-03-0-2021-178unclassified