Magnetron sputtering of a vanadium-diboride target in Ar+N2 gaseous mixtures

Бажин, А. І.; Goncharov, Alexander; Petukhov, V. V.; Radjabov, T.D.; Stupak, V. A.; Konovalov, V. A.

doi:10.1016/j.vacuum.2005.12.003

Cited by 6 publications

(1 citation statement)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The introduction of nitrogen can significantly alter the tribological properties and corrosion resistance of the coatings due to the formation of additional amorphous phases and grain refinement [14]. Previous works dedicated to coatings Ti-B-N [15], Hf-B-N [16] and V-B-N [17] demonstrated that the engineering of the structure, mechanical performance and wear resistance can be achieved by variation of the nitrogen content in the coatings (primarily by the application of different sputtering atmospheres). In addition to academic research, multiple enterprises introduce new grades of boronitride coatings for the machining tools [18].…”

Section: Introductionmentioning

confidence: 99%

Structure, Corrosion Resistance, Mechanical and Tribological Properties of ZrB2 and Zr-B-N Coatings

Kiryukhantsev-Korneev

Сытченко

Kaplanskii

et al. 2021

Metals

View full text Add to dashboard Cite

The coatings ZrB2 and Zr-B-N were deposited by magnetron sputtering of ZrB2 target in Ar and Ar–15%N2 atmospheres. The structure and properties of the coatings were investigated via scanning and transmission electron microscopy, energy dispersion analysis, optical profilometry, glowing discharge optical emission spectroscopy and X-ray diffraction analysis. Mechanical and tribological properties of the coatings were investigated using nanoindentation, “pin-on-disc” tribological testing and “ball-on-plate” impact testing. Free corrosion potential and corrosion current density were measured by electrochemical testing in 1N H2SO4 and 3.5%NaCl solutions. The oxidation resistance of the coatings was investigated in the 600–800 °С temperature interval. The coatings deposited in Ar contained 4–11 nm grains of the h-ZrB2 phase along with free boron. Nitrogen-containing coatings consisted of finer crystals (1–4 nm) of h-ZrB2, separated by interlayers of amorphous a-BN. Both types of coatings featured hardness of 22–23 GPa; however, the introduction of nitrogen decreased the coating’s elastic modulus from 342 to 266 GPa and increased the elastic recovery from 62 to 72%, which enhanced the wear resistance of the coatings. N-doped coatings demonstrated a relatively low friction coefficient of 0.4 and a specific wear rate of ~1.3 × 10−6 mm3N−1m−1. Electrochemical investigations revealed that the introduction of nitrogen into the coatings resulted in the decrease of corrosion current density in 3.5% NaCl and 1N H2SO4 solution up to 3.5 and 5 times, correspondingly. The superior corrosion resistance of Zr-В-N coatings was related to the finer grains size and increased volume of the BN phase. The samples ZrB2 and Zr-B-N resisted oxidation at 600 °C. N-free coatings resisted oxidation (up to 800 °С) and the diffusion of metallic elements from the substrate better. In contrast, Zr-B-N coatings experienced total oxidation and formed loose oxide layers, which could be easily removed from the substrate.

show abstract