Magnetron sputtered nanocomposite films of SI nanocrystals embedded in SIO2 for electronic and optoelectronic applications.

Abstract

Nanocomposite thin films of Si nanocrystals (nc-Si) embedded in SiO 2 have attracted intensive research for potential applications in next generation non-volatile memory device as well as Si-compatible light-emitting devices. This dissertation studies the structural, electrical and optoelectronic properties of the Si nanocomposite films. The Si nanocomposite films are IX 4.