2021
DOI: 10.1007/s12274-021-3805-1
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Magnetron co-sputtering synthesis and nanoindentation studies of nanocrystalline (TiZrHf)x(NbTa)1−x high-entropy alloy thin films

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Cited by 20 publications
(13 citation statements)
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“…This morphology could be attributed to the oxidation of TiZrHfNbTa. 21 As shown in the EDS results (Fig. 2), all the elements are homogeneously distributed without obvious segregation.…”
Section: Resultsmentioning
confidence: 66%
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“…This morphology could be attributed to the oxidation of TiZrHfNbTa. 21 As shown in the EDS results (Fig. 2), all the elements are homogeneously distributed without obvious segregation.…”
Section: Resultsmentioning
confidence: 66%
“…To eliminate the substrate effect, the modified King's model for Berkovich indenter 27 can be applied to calculate the elastic modulus of the film ( E f ):where E s and v s are the elastic modulus (169 GPa) and Poisson's ratio (0.28) of the silicon substrate, 28 a is the square root of the projected contact area, t is the thickness of the film, h is the displacement, and α is a numerically determined scaling parameter depending on the function of a / t 27 (the corresponding values of different films are listed in Table 1). The corresponding nanohardness can be determined as: 21 where P / S 2 is the load/stiffness 2 value and E stad r is the calculated standard reduced modulus ignoring the substrate effect, i.e. , a / t → 0.…”
Section: Methodsmentioning
confidence: 99%
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“…It is highly desirable to measure the mechanical properties of microscale particles at high strain rates over a large temperature range. Over the past decades, many new metallic materials have been developed and investigated. There are new opportunities to employ the cold spray method to these emerging metallic systems, including typical fcc HEAs, refractory bcc HEAs, nanostructured alloys, , and quasicrystals, providing a fundamental understanding of bonding mechanisms and microstructure evolution of these emerging materials processed by cold spray. …”
Section: Discussionmentioning
confidence: 99%
“…The complex hierarchical structure from the atomic to the macroscopic level endows HEAs with excellent mechanical properties, including high specific strength, yield strength, and fracture toughness at a wide range of temperatures [2,3]. Based on these intrinsic features, magnetron co-sputtering deposition is regarded as one of the promising high-throughput techniques to provide great scope for performance optimization [4]. In this case, extensive attempts have been made to fabricate HEAs in the form of a film, which exhibits high strength [5], thermal stability [6], and corrosion resistance [7] designed for advanced coating applications, such as diffusion barriers [8] and metallic nano-/micro-lattices [9].…”
Section: Introductionmentioning
confidence: 99%