Magnetostrictive TMR Sensors for Mechanical Measurements

Abstract

Magnetostrictive TMR sensors present a unique possibility to integrate highly sensitive strain sensors on micromachined membranes for sophisticated pressure sensors. The gauge factor of such strain sensors was 840. Using them on micromachined membranes an almost linear dependency between the resistance and the applied pressure was found. The resistance change was approximately 1 Ohm/mbar in a pressure range between 0 and 0.08 bar.