Magnetostrictive effect in micro-dotted FeCo film coated surface acoustic wave devices

Wang, Wen; Xue, Xufeng; Liang, Yong; Du, Zongliang

doi:10.1088/1361-665x/aae011

Cited by 12 publications

(9 citation statements)

References 27 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The sensitivity of membranous FeGa thin film coated device approximately agreed with the predicted value. The largest sensitivity was achieved from the dotted-FeGa thin film coated device, which is the result of enlarged magnetostrictive properties and reduced coercivity in the dot-film structure [9].…”

Section: Repeatability Testmentioning

confidence: 99%

“…Since the pioneering work was conducted by Ganguly et al in 1975 [10], the SAW devices for sensing current/magnetic field have attracted more interests because of their unique advantages, and meaningful results were reported from some prototypes. Using the FeCo thin film as the sensitive interface, the SAW current sensor prototype was constructed successfully, a larger sensitivity of 16.6 kHz/A was achieved, and the patterned design was considered to improve the hysteresis error [1,8,9]. A similar structure was also proposed by Tong et al; the current sensitivity of 10.7 kHz/A was achieved by using the FeNi as the sensing interface [11].…”

Section: Introductionmentioning

confidence: 98%

“…The magnetostrictive thin film produces magnetostrictive strain and so-called ∆E effect at the magnetic field generated by the applied current, which modulates the SAW propagation velocity accordingly. Then the corresponding shifts in oscillation frequency are collected to evaluate the applied current information [1,8,9].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Enhanced Sensitivity of FeGa Thin-Film Coated SAW Current Sensor

et al. 2021

View full text Add to dashboard Cite

A surface acoustic wave (SAW) device is proposed for sensing current by employing the patterned FeGa thin film as the sensitive interface. The layered media structure of FeGa/SiO2/LiNbO3 was established to reveal the working principle of the sensors, and an SAW chip patterned by delay-line and operating at 150 MHz was fabricated photolithographically on 128° YX LiNbO3 substrate. The FeGa thin film with a larger magnetostrictive coefficient was sputtered onto the acoustic propagation path of the SAW chip to build the sensing device. The prepared device was connected into the differential oscillation loop to construct the current sensor. The FeGa thin film produces magnetostrictive strain and so-called ΔE effect at the magnetic field generated by the applied current, which modulates the SAW propagation velocity accordingly. The differential frequency signal was collected to characterize the measurand. Larger sensitivity of 37.9 kHz/A, low hysteresis error of 0.81%, excellent repeatability and stability were achieved in the experiments from the developed sensing device.

show abstract

Section: Repeatability Testmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 98%

See 1 more Smart Citation

Enhanced Sensitivity of FeGa Thin-Film Coated SAW Current Sensor

et al. 2021

View full text Add to dashboard Cite

show abstract

“…Eq. (8) describes the relation between phase and frequency where the slope of γ(f ) at f res yields the well-known expression…”

Section: Mechanical Behavior and Electrical Sensitivitymentioning

confidence: 99%

Fundamental Noise Limits and Sensitivity of Piezoelectrically Driven Magnetoelastic Cantilevers

Durdaut

Rubiola

Friedt

et al. 2020

J. Microelectromech. Syst.

View full text Add to dashboard Cite

Magnetoelastic sensors for the detection of lowfrequency and low-amplitude magnetic fields are in the focus of research for more than 30 years. In order to minimize the limit of detection (LOD) of such sensor systems, it is of high importance to understand and to be able to quantify the relevant noise sources. In this contribution, cantilever-type electromechanical and magnetoelastic resonators, respectively, are comprehensively investigated and mathematically described not only with regard to their phase sensitivity but especially to the extent of the sensor-intrinsic phase noise. Both measurements and calculations reveal that the fundamental LOD is limited by additive phase noise due to thermal-mechanical noise of the resonator, i.e. by thermally induced random vibrations of the cantilever, and by thermal-electrical noise of the piezoelectric material. However, due to losses in the magnetic material parametric flicker phase noise arises, limiting the overall performance. In particular, it is shown that the LOD is virtually independent of the magnetic sensitivity but is solely determined by the magnetic losses. Instead of the sensitivity, the magnetic losses, represented by the material's effective complex permeability, should be considered as the most important parameter for the further improvement of such sensors in the future. This implication is not only valid for magnetoelastic cantilevers but also applies to any type of magnetoelastic resonator.

show abstract

“…Analogously, a maximum SAW velocity shift close to 20% was obtained from a multilayered sensing structure of TbCo 2 /FeCo/LiNbO 3 for the shear horizontal wave mode as a ratio close to 1 between magneto-elastic film thickness and wavelength [14]. Recently, high frequency sensitivities of 8.3 kHz/mT, 17.72 kHz/mT and 21.17 kHz/mT were achieved from the patterned FeCo thin-film coated SAW devices operating at 150 MHz [15]- [17].…”

Section: Introductionmentioning

confidence: 94%

Fatigue Characteristics of Magnetostrictive Thin-Film Coated Surface Acoustic Wave Devices for Sensing Magnetic Field

et al. 2020

Self Cite

View full text Add to dashboard Cite

Magnetostrictive thin-film coated Surface Acoustic Wave (SAW) devices were promising for sensing magnetic field owing to their superior features as micro-size, fast response, and high sensitivity originated from the magnetostrictive effect. However, the magnetostriction nature in magnetostrictive thinfilm causes significantly mechanical fatigue in service, deteriorating the sensor performances. In this work, the fatigue phenomenon in magnetostrictive coating was underlined by characterizing the prepared FeCo thin-film coated magnetic device cyclically. Obvious shedding was observed in FeCo coating after cyclic testing and the magnetic-sensitivity decreases significantly. One of the reasons is the weak adhesion of FeCo thin-film towards the substrate. As an available way allowing enhancement of adhesion, a Cr thinfilm was employed as the transition-layer to weaken the mechanical fatigue. However, it accompanied by the issue of the reduced magnetostrictive coefficient and the obstruction in magnetostrain-tranfer to piezoelectric substrate. As a result, the slump in sensitivity was observed. To address such issues, a design of dotted-pattern with Cr transition layer was employed to build the SAW based magnetic-device. High magnetic-sensitivity and excellent long-term stability were achieved because of the release of coercive force in FeCo dots and enhancement of the FeCo adhesion to the substrate.INDEX TERMS Dotted-pattern, mechanical fatigue, magnetostrictive effect, SAW magnetic sensor, Cr transition layer.

show abstract

Magnetostrictive effect in micro-dotted FeCo film coated surface acoustic wave devices

Cited by 12 publications

References 27 publications

Enhanced Sensitivity of FeGa Thin-Film Coated SAW Current Sensor

Enhanced Sensitivity of FeGa Thin-Film Coated SAW Current Sensor

Fundamental Noise Limits and Sensitivity of Piezoelectrically Driven Magnetoelastic Cantilevers

Fatigue Characteristics of Magnetostrictive Thin-Film Coated Surface Acoustic Wave Devices for Sensing Magnetic Field

Contact Info

Product

Resources

About