Magneto-optical disk formed by contact printing.

Ohta, Kenji; Hirokane, Junji; Inui, T.; Yamaoka, H.

doi:10.2493/jjspe.55.1379

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1991

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“…See Ref. (7). However , reactive ion etching is a relatively slow processwe observed etching rates of <0.1 nrn/sec.…”

Section: Residual T Resist Ashed T_ _ _ _ _ _ _ _ _mentioning

confidence: 82%

The Foundation for Your Memory

Barnes

1991

J. Magn. Soc. Jpn.

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The key technical characteristics of the four main optical disc substrate materials are compared and glass is shown to have superior characteristics for this application. The various methods for formatting the different substrate materials are noted, and the alternate approaches to direct formatting glass reviewed. Recent developments in hot pressing which have the potential for the mass production of a low cost direct formatted glass substrate are described.

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“…See Ref. (7). However , reactive ion etching is a relatively slow processwe observed etching rates of <0.1 nrn/sec.…”

Section: Residual T Resist Ashed T_ _ _ _ _ _ _ _ _mentioning

confidence: 82%