Magnetically actuated CMOS resonant cantilever gas sensor for volatile organic compounds

Vancura, C.; Ruegg, Michael; Li, Y.; Lange, D.; Hagleitner, Christoph; Brand, Oliver; Hierlemann, Andreas; Baltes, H.

doi:10.1109/sensor.2003.1217025

Cited by 9 publications

(8 citation statements)

References 7 publications

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“…Several excitation and detection mechanisms exist, including reversible, nonreversible, fully-integrated and non-integrated mechanisms. The main excitation schemes are electrostatic [6,7,9], piezoelectric [8], electrothermal [5] or electromagnetic [12] actuation and the main detection schemes are capacitive [7,9], optical [6,8,10] or piezoresistive [5,11,12] mechanism. Since the dependence upon the surrounding fluid, reliability issues or production cost can lead to different solutions from one application to another, there is no optimal principle although optical measurements can be almost noiseless but cannot be integrated.…”

Section: Introductionmentioning

confidence: 99%

Chemical sensing: millimeter size resonant microcantilever performance

Fadel

Lochon

Dufour

et al. 2004

J. Micromech. Microeng.

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Based on the use of a resonant cantilever, a mass sensitive gas sensor for the detection of volatile organic compounds (VOC) has been developed. Analyte gases are absorbed by a sensitive layer deposited on the cantilever: the resulting mass change of the system implies the cantilever resonant frequency decreases. In this paper, the process technology, based on the use of SOI wafer, is described. To integrate the measurement, piezoelectric and electromagnetic excitations are investigated and for the detection of microcantilever vibrations, piezoresistive measurement is performed. Then, the polymer choice and the spray coating system are detailed. Using various geometrical microcantilevers, the frequency dependence on mass change is measured and allows us to estimate the mass sensitivity (0.06 Hz ng−1). In gas detection the first experiments exhibit the sensor response, then by calculating the partition coefficient (K = 977), the minimum detectable concentration of ethanol is deduced and permits us to estimate the gas sensor resolution (14 ppm). Finally a comparison between millimeter size and micrometer size cantilevers shows the importance of noise in the design of an integrated sensor.

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Section: Introductionmentioning

confidence: 99%

Chemical sensing: millimeter size resonant microcantilever performance

Fadel

Lochon

Dufour

et al. 2004

J. Micromech. Microeng.

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“…W c Cantilever width. x 1 Distance of the PMOS transistors from the clamp z i Z coordinate of the interface between ith and (i + 1)th layers (Fig. 2).…”

Section: CCmentioning

confidence: 99%

“…0 Output electromechanical coupling coefficient. λ 1 First eigenvalue of the mode-shapes equation. ν i…”

Section: CCmentioning

confidence: 99%

“…1). The output signal of the bridge is amplified by an electronic circuitry and fed back to the driving conductor loop on the cantilever with a phase shift of 90 • to ensure resonant operation of the cantilever [1,2]. In order to verify proper resonant operation of the cantilever device together with the feedback circuit, we have developed a dynamic model of the cantilever structure, which can be used in a conventional circuit simulation program like SPICE.…”

Section: Introductionmentioning

confidence: 99%

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A Behavioural Model of Resonant Cantilevers for Chemical Sensing

Paci

Kirstein

Vancura

et al. 2005

Analog Integr Circ Sig Process

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We present a model for the behavioural description of resonant cantilevers for chemical sensing. This model is well suited to be implemented in an analog behavioural description language like Verilog-A to enable simulations of the cantilever devices together with integrated electronic circuits. The model is based on the assumption that the resonant cantilever can be described as a plate, with three free and one clamped end; we suppose the damping force acting on the structure is due to air friction and to the viscoelastic behaviour of the polymer used as sensitive layer. We have validated the model by modal FEM analysis (ANSYS TM ) and by measurements with a dynamic signal analyzer (DSA).Simulations with the Spectre TM circuit simulator, including the cantilever device and integrated feedback electronics, have been carried out and show good agreement with the measured transient behaviour of the cantilever devices.

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“…[1][2][3][4][5][6][7][8][9][10][11] Masses in the range of picograms and femtograms have been detected using these devices, with projected detection limits on the order of attograms. [11][12][13] While dynamically driven microcantilever chemical sensors are well suited for gas-phase detection, [1][2][3][5][6][7][8][9][10][11][14][15][16][17][18][19][20][21] their usefulness as a sensing platform is limited when operating in viscous liquid media.…”

Section: Introductionmentioning

confidence: 99%

Characteristics of laterally vibrating resonant microcantilevers in viscous liquid media

Cox

Josse

Heinrich

et al. 2012

Journal of Applied Physics

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The characteristics of microcantilevers vibrating laterally in viscous liquid media are investigated and compared to those of similar microcantilevers vibrating in the out-of-plane direction. The hydrodynamic loading on the vibrating beam is first determined using a numerical model. A semi-analytical expression for the hydrodynamic forces in terms of the Reynolds number and the aspect ratio (beam thickness over beam width) is obtained by introducing a correction factor to Stokes' solution for a vibrating plate of infinite area to account for the effects of the thickness. The results enable the effects of fluid damping and effective fluid mass on the resonant frequency and the quality factor (Q) to be investigated as a function of both the beam's geometry and liquid medium's properties and compared to experimentally determined values given in the literature. The resonant frequency and Q are found to be higher for laterally vibrating microcantilevers compared to those of similar geometry experiencing transverse (out-of-plane) vibration. Compared to transversely vibrating beams, the resonant frequency of laterally vibrating beams is shown to decrease at a slower rate (with respect to changes in viscosity) in media having higher viscosities than water. The theoretical results are compared to experimental data obtained for cantilevers completely immersed in solutions of varying aqueous percent glycerol. The increases in resonant frequency and Q are expected to yield much lower limits of detection in liquid-phase chemical sensing applications.

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Magnetically actuated CMOS resonant cantilever gas sensor for volatile organic compounds

Cited by 9 publications

References 7 publications

Chemical sensing: millimeter size resonant microcantilever performance

Chemical sensing: millimeter size resonant microcantilever performance

A Behavioural Model of Resonant Cantilevers for Chemical Sensing

Characteristics of laterally vibrating resonant microcantilevers in viscous liquid media

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