2015
DOI: 10.1063/1.4914121
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Magnetic tunnel junction based out-of-plane field sensor with perpendicular magnetic anisotropy in reference layer

Abstract: A magnetic tunnel junction (MTJ) with orthogonal magnetic anisotropy and consisting of Ta X/Co40Fe40B20 1.2 (reference)/MgO 2.0/Co20Fe60B20 2.3 (sensing)/Ta 5/Ru 5 (thickness in nanometers), where X ranges from 15 to 30, is proposed and investigated in response to the demand for out-of-plane field sensors. The reference layer with perpendicular magnetic anisotropy (PMA) demonstrates tuneable coercivity ranging from 72 Oe to 175 Oe. The sensing layer exhibits in-plane anisotropy with the avoidance of exchange c… Show more

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Cited by 21 publications
(10 citation statements)
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“…The synthetic anti-ferromagnet (SAF) was also applied to enhance the PMA and reduce the stray field from RL acting on SL. After the deposition, the annealing process at 350 °C for 1 h was applied to build the interfacial anisotropy between MgO and CoFeB, which caused the bottom CoFeB to become PMA and reduced the in-plane anisotropy of the top CoFeB [ 17 , 18 ]. The MR ratio was also enhanced due to the crystallization of CoFeB and MgO during the annealing process [ 19 ].…”
Section: Methodsmentioning
confidence: 99%
“…The synthetic anti-ferromagnet (SAF) was also applied to enhance the PMA and reduce the stray field from RL acting on SL. After the deposition, the annealing process at 350 °C for 1 h was applied to build the interfacial anisotropy between MgO and CoFeB, which caused the bottom CoFeB to become PMA and reduced the in-plane anisotropy of the top CoFeB [ 17 , 18 ]. The MR ratio was also enhanced due to the crystallization of CoFeB and MgO during the annealing process [ 19 ].…”
Section: Methodsmentioning
confidence: 99%
“…The pseudo resistor of RC feedback network should hold as possible as high resistance so that the area of capacitor can be decreased. The resistance of MTJ is inversely proportional to the area [30]. Therefore, the MTJ can show high resistance while occupy small area.…”
Section: The Analysis Of Noisementioning
confidence: 99%
“…The perpendicular easy axis of sensing layer is generated from CoFe layer pinned with CoFe/Pt multilayer, while its formation is completely natural without additional thermal processing. Another kind of perpendicular magnetic field sensor based on CoFeB/MgO interface has been proposed by Lee et al [66] in 2015. Because of the opposite magnetization direction situation as illustrated in Figure 8b, perpendicular magnetic field can be characterized with linear magnetoresistance response without rotating the position of sensor.…”
Section: Perpendicular Magnetic Anisotropy For Magnetic Field Sensormentioning
confidence: 99%