Magnetic stability of Fe-9.0 wt.% S/Permalloy multi-layered films in high temperature processes

Abstract

Abstrsct-Fe&.Owt%S@ermaiIoy multilayered film has high lnltlal permeability. However, the permeability decreases drastically after annealing at above 4OOOC because of the Ni diffusion at the boundary between permalloy and Fe-Si layers. We tried to improve the magnetic stability of the multilayered films in high temperature annealing in magnetic head fabrication processes. However, the crystallization is disordered during a high temperature process because of the diffusion at the boundary. Depositing each Fe-Si layer in more than 0.6pm thickness and using a lower Ar pressure, such as BmTorr, good soft magnetic properties can be obtained even after annealing at 500OC. w/cm'