Magnetic Properties of Electroformed Ni and Ni-Fe for Micromagnetic MEMS Applications

Abstract

This paper reports a new technique which is based on electroforming process for high permeability Ni and Ni-Fe alloy. The magnetic properties of Ni and Ni-Fe alloy are investigated as a function of plating current density via scanning electron microscope (SEM), energy dispersive spectroscopy (EDS), and vibrating sample magnetometer (VSM). Concentration-dependent kinetics is used to formulate the deposition rate and also the same is verified by using finite element analysis tool COMSOL Multiphysics. Several experiments are performed to derive the relation between electroplating parameters and magnetic properties. The process conditions are optimized to develop high permeability (∼16000) Ni-Fe alloy (85.71-14.29 %). The higher current density shows a monotonically increasing behavior of relative permeability (μ r ). In addition, the B-H curves indicate that the saturation magnetization (B sat ) increases and coercivity decreases with increasing plating current density. Our experimental data confirms that the higher current density increase the softness of Ni. The observed properties of Ni and Ni-Fe based on experimental results can be used to study the magnetic behavior of micromagnetic sensors and large force actuators.

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