Magnetic, thermal and electrical properties of sputtered Co60Fe20B20 alloy films are investigated. An excellent linear relationship between the saturation magnetization per unit area and thickness is obtained in the as-deposited film with thickness ranging from 10 to 100 nm. For the as-deposited films a high effective saturation magnetization of 793.7 ± 42.9 emu cm −3 is derived from the fitting. An in-plane uniaxial magnetic anisotropy of~10 4 erg cm −3 in magnitude is revealed by angular dependent magnetic measurements. A fourfold cubic magnetic anisotropy is found to develop with annealing, in line with the improvement of the crystalline structure in the film confirmed by X-ray diffraction measurements. Thermomagnetic measurements reveal a considerable variation of the saturation magnetization with temperature arising from the competition of the crystallization and the temperature dependent ferromagnetic behavior of the alloy film. Pronounced changes in electrical resistivity with temperature were observed in the alloy film, in accompany with the structural change. The activation barrier for crystallization was determined to be 1.43 eV from the electrical measurements with variable heating rates, showing a good thermal stability of the alloy film.