Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-Ray Optics

Abstract

An alternating magnetic field assisted finishing (MAF) technique has been developed to finish the 5-20 um wide pore sidewalls of micropore X-ray focusing optics fabricated using microelectromechanical systems (MEMS) techniques. To understand the material removal mechanism, this MAF technique is used to finish a silicon MEMS micropore X-ray optic that had previously undergone a hydrogen annealing treatment. Compared to the unfinished surface, distinctive surface features are observed on the finished surfaces using scanning electron microscopy, optical profilometry, and atomic force microscopy (AFM). This demonstrates the finishing characteristics and reveals material removal on the nanometer scale. Moreover, the representative unfinished and finished micropore sidewall surfaces show a reduction in roughness due to finishing from 1.72 to 0.18 nmRq.

Experimental Study of High Temperature Hydrozing Annealing 1J50 Alloy's Magnetic Properties

“…Therefore, the relationship between coercive force and grain size can be expressed as [11,12] the grain size becomes larger. Hydrogen annealing changes the surface texture by chemically and thermally encouraging the diffusion of surface atoms to a lower energy state [13]. Many theoretical models have been developed to explain the kinetics of grain growth in various materials [14].…”

Modelling the Brittle/Ductile Transition in Super-Fine Finishing of Carbides

“…A number of sub-aperture finishing processes qualify in all these respects, a non-exhaustive list of which includes: a) Bound abrasives: processes such as grolishing (a soft tool and pad embedded with abrasives) [2], and shape adaptive grinding (SAG, an elastic tool covered with rigid pellets loaded with abrasives) [3]. b) Loose abrasives: processes such as bonnet polishing (an elastic tool with a soft pad and abrasive slurry) [4], fluid jet polishing (FJP, a pressurized stream of abrasive slurry) [5], magnetic abrasive finishing (MAF, a slurry of abrasives and ferrite particles under a magnetic field) [6], elastic emission machining (a stiff elastic wheel in microscopic contact with the workpiece) [7], and ultra-sonic vibration polishing [8].…”