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2010
DOI: 10.1063/1.3486513
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Magnetic characterization of micropatterned Nd–Fe–B hard magnetic films using scanning Hall probe microscopy

Abstract: Scanning Hall probe microscopy has been used for the quantitative measurement of the z-component (out-of-plane) of the stray magnetic fields produced by Nd–Fe–B hard magnetic films patterned at the micron scale using both topographic and thermomagnetic methods. Peak-to-peak field values in the range 20–120 mT have been measured at scan heights of 25–30 μm above the samples. Quantitative comparison between calculated and measured field profiles gives nondestructive access to the micromagnets’ internal magnetic … Show more

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Cited by 58 publications
(48 citation statements)
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“…The entire wafer surface was covered with a trilayer of Ta(100 nm)/Fe(10 µm)/Ta(100 nm) deposited by triode sputtering at room temperature under a base pressure of 10 −6 mbar according to a procedure described elsewhere 30 . The role of the tantalum (Ta) is to protect the iron from oxidation.…”
Section: Methodsmentioning
confidence: 99%
“…The entire wafer surface was covered with a trilayer of Ta(100 nm)/Fe(10 µm)/Ta(100 nm) deposited by triode sputtering at room temperature under a base pressure of 10 −6 mbar according to a procedure described elsewhere 30 . The role of the tantalum (Ta) is to protect the iron from oxidation.…”
Section: Methodsmentioning
confidence: 99%
“…where µ 0 is the vacuum permeability, V np is the volume of the object, M its magnetization and ∇H the gradient of magnetic field [8] . In the case of superparamagnetic particles, the magnetization is given by…”
Section: Magnetic Forcesmentioning
confidence: 99%
“…The flux density at the surface of these micro-patterned structures is maximal at the boundaries between oppositely magnetized domains. 21 …”
Section: B Micromagnet Fabricationmentioning
confidence: 99%
“…The permanent micromagnets integrated in the microfluidic device are capable of generating a high magnetic field gradient approaching 10 6 T/m at the magnetic film surface. 21 The miniMACS is a commercial system dedicated to high-gradient magnetic cell separation. Indeed, MS Columns contain an optimized matrix composed of ferromagnetic spheres, which concentrate the field lines when placed in the magnetic field of the MiniMACS Separator, thus inducing a high gradient within the column.…”
Section: B Jurkat Cell Enrichmentmentioning
confidence: 99%
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