2005
DOI: 10.1063/1.1855458
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Magnetic annealing of plated high saturation magnetization soft magnetic FeCo alloy films

Abstract: Plated high saturation magnetization soft magnetic FeCo films were annealed in magnetic field; their stress, microstructure, and magnetic properties were investigated. The FeCo films consistently showed a reduced tensile stress after magnetic annealing at temperatures above 255°C. The annealing temperature was found to be the primary factor in reducing the tensile stress, while annealing time was secondary. The FeCo films showed improved soft magnetic properties when subjected to an easy axis annealing with re… Show more

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Cited by 12 publications
(6 citation statements)
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“…[ 33,39,40 ] Hence, annealing with the parameters used here could be utilized to relax the stress in the magnetic layers if the resonator plates have κ < 0 after fabrication, and thereby improve the sensor frequency response. But there is an opportunity to study the annealing method further to see if different process parameters can tune the stress in the other direction [ 41 ] so as to achieve performance improvement for sensors with κ > 0 as well. Further investigation is also necessary to fully understand the effect generated by high‐voltage driving amplitude.…”
Section: Resultsmentioning
confidence: 99%
“…[ 33,39,40 ] Hence, annealing with the parameters used here could be utilized to relax the stress in the magnetic layers if the resonator plates have κ < 0 after fabrication, and thereby improve the sensor frequency response. But there is an opportunity to study the annealing method further to see if different process parameters can tune the stress in the other direction [ 41 ] so as to achieve performance improvement for sensors with κ > 0 as well. Further investigation is also necessary to fully understand the effect generated by high‐voltage driving amplitude.…”
Section: Resultsmentioning
confidence: 99%
“…For Pt element, it has similar atomic radius and crystal cell volume with Al element, so they play similar role in doping into FeCo alloys’ crystal lattices, thus cause similar relative lattice strain between FeCo grains, resulting in similar relative lattice deformation ( d - d 0 )/ d 0 values, which is dominant in promoting preferred orientation in (200) planes or (110) planes 26 . It is also noted that the more element doping whether Al or Pt are introduced, the more relative lattice strain are formed, so appropriate choosing of doping element and doping content is important in promoting (200) texture in FeCo thin films.…”
Section: Resultsmentioning
confidence: 99%
“…The properties of all the CoCrFeNi‐based films are compared with those of the reported soft magnetic bulk HEAs, HEATFs, and other traditional soft magnetic films, such as amorphous/nanocrystalline films and nano‐granular films (comparison only with materials that are characterized by M S , H C , and ρ ). [ 4,21,27,32,36,90–113 ] A material with ρ > 150 µΩ·cm can be considered as a high‐resistance material (above the black‐dotted line in the figure). The electrical resistivities of the CoCrFeNi‐based HEATFs are higher than 150 µΩ·cm, indicating that these electrical resistivities are twice that of the bulk HEAs and amorphous/nanocrystalline films.…”
Section: Advantages Of the Core–shell Structure For The Magnetic Prop...mentioning
confidence: 99%
“…Soft magnetic‐performance parameters ( M S / H C )–electrical resistivity ( ρ ) profiles of the investigated CoCrFeNi‐based HEATFs compared to those of bulk HEAs, other HEATFs and transitional thin films. [ 4,21,27,32,36,90–113 ] …”
Section: Advantages Of the Core–shell Structure For The Magnetic Prop...mentioning
confidence: 99%