2006
DOI: 10.1063/1.2174113
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Magnetic and electrical properties of amorphous CoFeB films

Abstract: CoFeB films were deposited on glass substrate by the sputtering method. From x-ray-diffraction and electron-diffraction-ring patterns, the major phase in the as-deposited CoFeB film is amorphous (or nanocrystalline). However, we could also identify a minor CoFe(110) crystalline phase in the film. We have tried to suppress this crystalline phase by changing the Ar partial pressure (PAr) during deposition and found that the optimal condition is PAr=5×10−3Torr. Because the electrical resistivity value (ρ) of the … Show more

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Cited by 94 publications
(48 citation statements)
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“…Our study demonstrates the electron localization correction to both sheet resistance R xx and G AH , and displays the scaling relationship of ultrathin amorphous CoFeB films in both Bloch and localization regions. the R xx -t curves of the films at 5 K. One can see that R xx decreases with the increase of t, which can be attributed to the enhanced surface scattering due to the decreased t. The ρ xx of t=2 nm is 1735.8 μΩ cm at room temperature, which is consistent with the reported values of amorphous CoFeB film [21,23]. Fig.…”
Section: Introductionsupporting
confidence: 80%
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“…Our study demonstrates the electron localization correction to both sheet resistance R xx and G AH , and displays the scaling relationship of ultrathin amorphous CoFeB films in both Bloch and localization regions. the R xx -t curves of the films at 5 K. One can see that R xx decreases with the increase of t, which can be attributed to the enhanced surface scattering due to the decreased t. The ρ xx of t=2 nm is 1735.8 μΩ cm at room temperature, which is consistent with the reported values of amorphous CoFeB film [21,23]. Fig.…”
Section: Introductionsupporting
confidence: 80%
“…With the applied field increasing, the magnetization is forced to rotate to the field direction gradually, which results in a linearly field-dependent magnetization until saturation. The magnetization of t=2 nm is nearly 1000 emu/cm 3 , which is much larger than that of magnetite (400 emu/cm 3 ), indicating the nature properties of amorphous CoFeB film [21,33]. The saturation magnetic field of t=40 nm is larger than that of t=2 nm.…”
Section: Methodsmentioning
confidence: 84%
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“…40 The measured CoFeB resistivity of 1 − 2 × 10 3 μ cm is one order of magnitude larger compared to the best values given in literature for CoFeB alloy films with a comparable thickness. 41,42 For R(T), we do not find a T 3/2 dependence in the accessible temperature range and rule out magnetic contributions to R(T). 43 The characteristic minima in R(T) [Fig.…”
Section: Min (R) Is the Minimum Resistance Value The Amr Ratio Is Dementioning
confidence: 99%
“…One of the drawbacks of using CoFeB compared to 3d metals or their alloys is the higher resistivity. 19 In our wire samples the resistivity is about a factor 2.5 higher ͑170 ⍀ cm͒ than for Permalloy wires ͑70 ⍀ cm͒. This means that for identical geometries a voltage that is 2.5 times higher than that used for Permalloy is needed to obtain the same current density.…”
Section: Methodsmentioning
confidence: 90%