Macroporous Silicon

Gabouze, N.; Ozanam, F.

doi:10.1007/978-3-319-05744-6_10

Cited by 4 publications

(3 citation statements)

References 66 publications

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“…Since its first description, MPS has attracted great interest, and it has been suggested for many applications in several fields such as electronics [11], optics [5], photonics [12] solar cells [13] , and even energy storage [14] fuel cells [6] or catalysis [15] Several methods for the fabrication of ordered MPS have been used such as reactive ion etching, stain etching [16],metal assisted etching [17], direct laser writing (DLW) [18], lithographic methods (layer-by-layer [19], interference lithography [20], block copolymer [21]) and glancing angle deposition [22] However, the electrochemical etching of silicon remains one of the most important and versatile fabrication methods. In this method, the MPS layer is formed on the crystalline silicon (c-Si) by anodic electrochemical etching in aqueous hydrofluoric (HF) solution [23]. Anodic oxidation of silicon is connected with the consumption [10] of holes at the surface.…”

Section: Introductionmentioning

confidence: 99%

The Influence of Preparation Parameters on Structural and Optical Properties of N-Type Porous Silicon

M'hammedi

Gabouze²

2023

J. Mod. Mater.

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In this paper, we describe the formation of macroporous silicon (MPS) formed anodically polarized on n type Si (100) substrates at a constant current density under front side illumination using two electrolytes, HF/Ethanol and HF/Ethanol/H2O2. The effect of adding H2O2 in the solution on the resulting pores were investigated by scanning electron microscopy (SEM), infrared spectroscopy (FTIR), contact angle measurements and UV-vis spectrophotometry. The results showed that for the anodization conditions the MPS formed in peroxide based (H2O2)/HF/Ethanol solution exhibited structures with larger pore size and different pore morphologies depending on the etching time than those formed in HF/Ethanol. The pore density and the pore size of the MPS samples increased with the etching time. The infrared absorption spectrum (FTIR) carried out on the freshly prepared sample indicates that the MPS contains Si-Hx bonds which decrease with increasing the etching time. Finally, measurements of contact angle indicate that the formed MPS samples are highly hydrophobic.

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Section: Introductionmentioning

confidence: 99%

The Influence of Preparation Parameters on Structural and Optical Properties of N-Type Porous Silicon

M'hammedi

Gabouze²

2023

J. Mod. Mater.

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“…Существующие теории формирования макропор (см. обзор предложенных механизмов в [7]) не описывают всю сложную совокупность явлений, происходящих в процессе анодного растворения кремния, поэтому продолжают появляться новые модели травления кремния и порообразования во фторсодержащих растворах [8][9][10].…”

Section: Introductionunclassified

Образование макропор в n-Si при анодировании в органическом электролите

Астрова¹,

Преображенский²,

Ли³

et al. 2018

Физика И Техника Полупроводников

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The photoelectrochemical etching of solar-grade n -type silicon in a 4% solution of HF in dimethylformamide is experimentally studied. The pore morphology, porosity, effective valence, and etching rate are examined in relation to the applied voltage, illumination intensity of the sample’s backside, and process duration. It is found that the anodization of n -Si in an organic electrolyte substantially differs from that in aqueous solutions. This is manifested in that, at a voltage exceeding the threshold value, in the so-called breakdown mode, macropores with vertical walls begin to multiply and branch intensively due to the appearance of side pores. The appearance of secondary pores is accompanied by an increase in porosity, a decrease in the propagation velocity of the porous front deeper into the substrate, and rapid transition to the electropolishing mode. In the breakdown mode at a low illumination level, a fractal structure of macropores propagating along certain crystallographic directions is observed: 〈100〉 and along the previously unobserved 〈111〉. It is demonstrated that the morphology of macropores can be controlled in the course of anodization by passing from one mode to another upon changing the external parameters: voltage or illumination. It is shown that using an organic electrolyte makes it possible to obtain macroporous membranes with a porosity substantially exceeding that of macroporous membranes formed in aqueous electrolytes under the same conditions.

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“…Holes generated by light enable dissolution of Si, and the applied voltage focuses these holes and creates conditions in which the reaction occurs at the pore bottom. The photoanodization in aqueous electrolytes at low voltages is well understood and enables formation of cylindrical macropores (channels) with well passivated walls [1,2]. High-quality macropores are commonly formed in a solution with low HF content (2%-6%).…”

Section: Introductionmentioning

confidence: 99%

Comparison of n-Si photoanodization in organic and aqueous electrolytes

Astrova¹,

Preobrazhenskiy²,

Lihachev³

et al. 2018

J. Micromech. Microeng.

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The electrochemical etching of n-Si in a hydrofluoric solution in dimethylformamide under backside illumination has been experimentally studied. The dependences of the morphology of macropores being formed, porosity, etching rate, and effective valence on voltage and light intensity were examined. The results are compared with the data obtained under the same conditions in a H2O-based control electrolyte with the same hydrofluoric concentration. It is shown that the photoanodization in an organic electrolyte is characterized by intensive formation of secondary pores, rapid transition to electropolishing, and better conditions for separation of the porous layer from a substrate. Attention is given to the anodization in the breakdown mode, for which the difference from the aqueous electrolyte is the most pronounced. The thus formed layers have a higher porosity, lower pore growth rate, unusual orientation of secondary pores along the 〈1 1 1〉 crystallographic axis, and, under high-intensity illumination, large value of the effective valence.

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Macroporous Silicon

Cited by 4 publications

References 66 publications

The Influence of Preparation Parameters on Structural and Optical Properties of N-Type Porous Silicon

The Influence of Preparation Parameters on Structural and Optical Properties of N-Type Porous Silicon

Образование макропор в n-Si при анодировании в органическом электролите

Comparison of n-Si photoanodization in organic and aqueous electrolytes

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