Abstract:Tool-induced shift (TIS) is a common method used to quantify measurement error or accuracy of an overlay (OVL) metrology tool and is often attributed to tool asymmetry issues. In a previous paper, we introduced Modeled-TIS (mTIS), a machine learning (ML) based algorithm to predict per-site TIS correction on Image- Based Overlay (IBO) measurements. Recently, we adapted mTIS to support the requirements of high-volume manufacturing (HVM) in 3D NAND production. During our work in an HVM environment, we observed th… Show more
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