Machine-learning-assisted and real-time-feedback-controlled growth of InAs/GaAs quantum dots
Chao Shen,
Wenkang Zhan,
Kaiyao Xin
et al.
Abstract:The applications of self-assembled InAs/GaAs quantum dots (QDs) for lasers and single photon sources strongly rely on their density and quality. Establishing the process parameters in molecular beam epitaxy (MBE) for a specific density of QDs is a multidimensional optimization challenge, usually addressed through time-consuming and iterative trial-and-error. Here, we report a real-time feedback control method to realize the growth of QDs with arbitrary density, which is fully automated and intelligent. We deve… Show more
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