“…While these sensors were used for adaptive optics in astronomy and high-energy lasers, they have been applied to a wide range of problems recently, including laser beam characterization [5,6], fluid turbulence measurement [7][8][9], optical system alignment [10], ophthalmic metrology [11], wafer metrology [12], optical metrology for both large [13] and small [14] optics. The basic measurement principle is similar to the Hartmann test of the early 1900s.…”