<title>Two-axis micropositioning system with piezoelectric actuators and digital control</title>

A novel parallel-kinematics mechanisms for integrated, multi-axis nanopositioning

“…This set of papers introduces a new kinematic scheme for XYZ positioning, analyzes the kinematics and dynamics of the system, discusses its fabrication and provides contouring test results for the system. While the concentration of this paper is on the use of a novel parallel-kinematic scheme for nanopositioning, to provide a context for the work, it is important to note that the characteristics and selection component technologies such as actuators [8][9][10][11][12], sensors [13][14][15], controllers and control strategies [16][17][18][19], joints and mechanical structures for amplifying and guiding motion [1,3,15,[20][21][22][23]27,28,33,34] are also very important in deciding the overall behavior of the system. Thus summarizing, a plethora of technologies exist for actuating and sensing to suit different application requirements.…”