Abstract:Testing of micro-electro-mechanical systems (MEMS) for optimization purposes or reliability checks can be supported by device visualization whenever an optical access is available. The difficulty in such an investigation is the short time duration of dynamical phenomena in micro devices. This paper presents a test setup to visualize movements within MEMS in real-time and in two perpendicular directions. A three-dimensional view is achieved by the combination of a commercial high-speed camera system, which allo… Show more
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