&lt;title&gt;Thickness-aware LFD for the hotspot detection induced by topology&lt;/title&gt;

Kang, Ji-Hoon; Ha, Naya; Park, Joo-Hyun; Kim, Byung-Moo; Paek, Seung Weon; Choi, Hungbok; Kim, Kee Sup; Mohy, Ahmed; Abdelwahed, Shady; Imam, Mohamed A.

doi:10.1117/12.917998

Design for Manufacturability Through Design-Process Integration VI

2012

DOI: 10.1117/12.917998

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<title>Thickness-aware LFD for the hotspot detection induced by topology</title>

Ji-Hoon Kang

Naya Ha

Joo-Hyun Park

et al.

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