&lt;title&gt;Thermal infrared radiometer scan mirror optical performance&lt;/title&gt;

Roybal, W.; Hackman, Michael T.; Kincade, J.

doi:10.1117/12.256215

Cited by 1 publication

(1 citation statement)

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“…Neither the reflectivity nor the wavefront error reaches the stringent specification given in table 1. Considering the wavefront error requirement, especially under inertial and thermal distortions, the silicon wafers used in this application are rather thin (525 µm) compared with the mirror diameter (23 mm) [1,[11][12][13]. We are currently investigating the possibility of manufacturing the reflective surface on a separate, thicker substrate made of a different material and gluing it on top of the silicon actuator.…”

Section: Designmentioning

confidence: 99%

Scanning micromechanical mirror for fine-pointing units of intersatellite optical links

Suhonen

Graeffe

Sillanpää

et al. 2001

Smart Mater. Struct.

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A light and fast two-axial fine-pointing mirror has a number of space applications, especially in intersatellite optical links. The fine pointing of laser beams in optical links is currently realized with electromagnetic or piezoelectric actuators, which are relatively large and heavy. Micro-electro-mechanical system technology bears a high potential in space applications, offering a reduction in device size, mass and power consumption. Microtechnology facilitates batch mode fabrication, yielding a low cost per unit. VTT Automation has designed and partially tested a silicon micromachined electrostatically actuated two-axial mirror, which can be controlled with microradian resolution and large bandwidth over the angular range of ±3 mrad.

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Section: Designmentioning

confidence: 99%