<title>The vortex mask design for irregular arrays of contact holes</title>

On the 50th Birthday of Pavel G. Serafimovich

“…From 2002 to 2006 Serafimovich worked in South Korea at the Samsung Advanced Institute of Technology. In this institute he took part in development of several illuminating and laser systems [33,34], which were patented in the USA [35,36]. The resulting scientific basis allowed him to start preparing his doctoral thesis.…”