1994
DOI: 10.1117/12.171223
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<title>Segmentation engine: a real-time image segmentation subsystem</title>

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“…It uses Depict to calculate the aerial intensity image of the mask and also to simulate exposure and development of the photoresist. The Integrated CAD Framework compares the image of the mask after photolithographic simulation to the original mask using pattern matching techniques [18], [19]. It uses the "degree of match" between these to determine acceptability of the mask under current process conditions.…”
Section: ) Critical Features In Masksmentioning
confidence: 99%
“…It uses Depict to calculate the aerial intensity image of the mask and also to simulate exposure and development of the photoresist. The Integrated CAD Framework compares the image of the mask after photolithographic simulation to the original mask using pattern matching techniques [18], [19]. It uses the "degree of match" between these to determine acceptability of the mask under current process conditions.…”
Section: ) Critical Features In Masksmentioning
confidence: 99%