&lt;title&gt;Resistance degradation in early stage of electromigration of Al(Cu) metal lines&lt;/title&gt;

Guo, Qiang; Lo, Keng Foo; Manna, I.; Xu, Zhiwei; Jie, B.B.

doi:10.1117/12.404878

SPIE Proceedings

2000

DOI: 10.1117/12.404878

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<title>Resistance degradation in early stage of electromigration of Al(Cu) metal lines</title>

Qiang Guo¹,

Keng Foo Lo²,

I. Manna³

et al.

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<title>Resistance degradation in early stage of electromigration of Al(Cu) metal lines</title>

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