“…Studies of the B 4 C laser ablation plumes in the IR and in the UV via optical emission spectroscopy and low-order harmonic generation [16] have revealed the presence of C and B neutral and ion species and of C 2 molecules. The velocity of the gaseous species arriving at the substrate is highly wavelength dependent and is estimated to be 10 times larger at 266 nm than at 1064 nm.…”
Section: Discussionmentioning
confidence: 99%
“…The in-situ study of the B 4 C laser ablation plasma via optical emission spectroscopy and low-order harmonic generation has been proposed as a guide for controlled thin film synthesis through PLD [16][17][18]. Mostly amorphous B 4 C films have been grown by nanosecond UV laser ablation using the wavelengths of 266 and 248 nm [11,12,15].…”
Section: Page 4 Of 26mentioning
confidence: 99%
“…A c c e p t e d M a n u s c r i p t 4 include chemical vapor deposition (CVD) [6,7], laser-assisted CVD [8,9], magnetron sputtering [10] and pulsed laser deposition (PLD) [11][12][13][14][15][16].…”
“…Studies of the B 4 C laser ablation plumes in the IR and in the UV via optical emission spectroscopy and low-order harmonic generation [16] have revealed the presence of C and B neutral and ion species and of C 2 molecules. The velocity of the gaseous species arriving at the substrate is highly wavelength dependent and is estimated to be 10 times larger at 266 nm than at 1064 nm.…”
Section: Discussionmentioning
confidence: 99%
“…The in-situ study of the B 4 C laser ablation plasma via optical emission spectroscopy and low-order harmonic generation has been proposed as a guide for controlled thin film synthesis through PLD [16][17][18]. Mostly amorphous B 4 C films have been grown by nanosecond UV laser ablation using the wavelengths of 266 and 248 nm [11,12,15].…”
Section: Page 4 Of 26mentioning
confidence: 99%
“…A c c e p t e d M a n u s c r i p t 4 include chemical vapor deposition (CVD) [6,7], laser-assisted CVD [8,9], magnetron sputtering [10] and pulsed laser deposition (PLD) [11][12][13][14][15][16].…”
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