&lt;title&gt;Polar-coordinate laser writing systems: error analysis of fabricated DOEs&lt;/title&gt;

Полещук, А. Г.; Korolkov, V. P.; Cherkashin, Vadim V.; Reichelt, Stephan; Burge, James H.

doi:10.1117/12.448037

Cited by 16 publications

(6 citation statements)

References 14 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…It means there is no precession. To measure the present spindle runout, Poleshchuk et al 4,9 suggested to exposure a small ring (diameter of several tens microns) near the rotation center in the recording layer and to measure photoelectrically the diameter of this ring as function of the rotation angle. The diameter is defined by a photoelectrical scanning measurement as the distance between two opposite points at a given rotation angle where the intensity of the reflected signal has a minimum or maximum (this depends on the type of recording media).…”

Section: Non-rotationally Symmetric Pattern Distortion Errormentioning

confidence: 99%

See 1 more Smart Citation

Performance improvement of CGHs for optical testing

et al. 2003

Self Cite

View full text Add to dashboard Cite

The expansion of the field of diffractive optics applications is accompanied by toughening performance requirements for CGHs. Optical testing sets especially high requirements, concerning wavefront accuracy and diffraction efficiency. The key point in fabrication technology is the writing system creating the photomask or the profiled pattern. The diffractive optics fabrication facility at ITO (University of Stuttgart) is based on the circular laser writing system CLWS-300. This flexible and high-accurate tool was originally designed for binary diffractive optics fabrication. This paper presents novel enhancements of this system allowing direct laser writing of a wide range of binary and continuous-relief CGHs on photoresist layers, chromium films and LDW-glass. Main topics of the enhancements were the scanning accuracy and exposure control.Many types of CGHs (binary precision holograms for optical testing, Shack-Hartmann arrays, microlens discs for confocal microscopy, diffractive interferometer objectives, doughnut generators etc.) have been manufactured using the developed algorithms and hardware.

show abstract

Section: Non-rotationally Symmetric Pattern Distortion Errormentioning

confidence: 99%

“…In recent years, great efforts have been undertaken to deal with the latter point. [4][5][6][7] However, for day-to-day use in the optical shop a negligible error of the CGH-null is more desirable. In this paper, we present enhancements of our writing system that substantially improve the positioning accuracy of the written structures.…”

Section: Introductionmentioning

confidence: 98%

Performance improvement of CGHs for optical testing

et al. 2003

Self Cite

View full text Add to dashboard Cite

show abstract

“…With the rapid development of ultra-precision manufacturing technology, workpieces with sub-micron/nano machining precision have been widely used in high-end equipments and research fields [1][2][3][4][5][6] . For example, aerostatic bearing spindles are used in ultra-precision turning machine and lithography machine, and the roundness departure of spindle is within 0.05μm after precision grinding [7] , radial rotary error of high speed motorized spindle is required less than 0.1μm in the field of microelectronic equipment, the form error of gas-supported gyro used in inertial navigation also is strictly controlled, cylindricity is better than 0.1μm/10mm.…”

Section: Introductionmentioning

confidence: 99%

Calibration of sensor system used in ultra-precision form measuring instrument

Huang

Sun

et al. 2013

Eighth International Symposium on Precision Engineering Measurement and Instrumentation

View full text Add to dashboard Cite

Static and dynamic calibration methods of sensor system used in ultra-precision form measuring instrument are investigated. The nonlinear error of sensor system are corrected through static calibration, and the nonlinear characteristic of sensor system is obtained with a piezo nanopositioning stage, then the nonlinear characteristic is stored in a computer in the form of error correction function, while the sensor system works, according to the established error correction function, corrected value of nonlinear error that correspond to the measured point is to be taken out automatically, and the actual measurement data could be compensated by real-time, namely, the dynamic compensation model for nonlinear error could be established. Especially, if the position of measurement data point is not the same as that pre-stored in computer, corrected value could be obtained using linear interpolation. Dynamic calibration of sensor system is performed using the elliptical standards, and in this case the calibration status of sensor system is consistent with its normal measurement status.

show abstract

“…Fabrication errors of the CGH can be classified into two basic types: irregularities in the CGH substrate, and the pattern errors. The pattern errors include etching depth errors, duty-cycle errors, surface roughness errors and pattern distortion errors [3].…”

Section: Introductionmentioning

confidence: 99%

Optimal design of computer-generated holograms to minimize sensitivity to fabrication errors

Zhou

Burge

2007

Opt. Express

Self Cite

View full text Add to dashboard Cite

Aspheric optical surfaces are often tested using computer-generated holograms (CGHs). The etching of the CGH pattern must be highly accurate to create desired wavefronts. Variations of line width, etching depth, and surface roughness cause unwanted wavefront errors. The sensitivity to these manufacturing errors is studied using scalar diffraction analysis. We provide a parametric model that can be used for optimizing the CGH design to give good diffraction efficiency and limited sensitivity to manufacturing errors.

show abstract

<title>Polar-coordinate laser writing systems: error analysis of fabricated DOEs</title>

Cited by 16 publications

References 14 publications

Performance improvement of CGHs for optical testing

Performance improvement of CGHs for optical testing

Calibration of sensor system used in ultra-precision form measuring instrument

Optimal design of computer-generated holograms to minimize sensitivity to fabrication errors

Contact Info

Product

Resources

About