2000
DOI: 10.1117/12.384398
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<title>Optoelectronic scalable substrates based on film/Z-connection and its application to film optical link module (FOLM)</title>

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Cited by 16 publications
(10 citation statements)
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“…[3][4][5][6] Figure 14 shows an example of SORT applied to heterogeneous device integration in 3D-MOSS fabrication. First, a thin-film microoptical switch array, micro-lens array, and micro mirror array are prepared on different device growth wafers.…”
Section: Materialõcost-saving Heterogeneous Integration Processmentioning
confidence: 99%
See 2 more Smart Citations
“…[3][4][5][6] Figure 14 shows an example of SORT applied to heterogeneous device integration in 3D-MOSS fabrication. First, a thin-film microoptical switch array, micro-lens array, and micro mirror array are prepared on different device growth wafers.…”
Section: Materialõcost-saving Heterogeneous Integration Processmentioning
confidence: 99%
“…2, which is the base of 3D-MOSS, is reviewed following previous works of the author. [3][4][5][6] In S-FOLM, first the basic elements are prepared, including electrical parts like large-scale integrated circuit ͑LSI͒ and multichipmodule ͑MCM͒, and OE films that contain thin-film ͑TF͒ VCSEL, photodetector ͑PD͒, optical switch, LSI, and so on. By combining these elements, many kinds of products are made such as a smart pixel, OE MCM, OE printed circuit board ͑PCB͒, and 3D-stack-OE-MCM.…”
Section: S-folm Conceptmentioning
confidence: 99%
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“…In recent years, integrated optical interconnects with embedded thin-film optical devices [6][7][8][9][10][11][12] have been received much attention as the next-generation systems, including three-dimensional (3D) [11][12][13][14][15][16][17][18] and nano-scalewaveguide-based optical interconnects [14,[19][20][21].…”
Section: Introductionmentioning
confidence: 99%
“…Three-dimensional (3D) optical wiring [1][2][3][4][5] is applicable to integrated optical interconnects and solar energy conversion systems. The 3D architecture is based on device-embedded optical waveguide films with 45 o mirrors of core end facets.…”
Section: Introductionmentioning
confidence: 99%