1991
DOI: 10.1117/12.50498
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<title>Optimal estimation of finish parameters</title>

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Cited by 67 publications
(38 citation statements)
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“…Relations exist for such a conversion. 10 However, the equations are sensitive to the noise in the measurements and thus cannot be used for our data. To solve this problem, we developed a simpler conversion based on the relation between the rms roughness and the PSD function for the 1-D and the 2-D isotropic cases:…”
Section: Calculation Of the Power Spectral Density Function And The Rmentioning
confidence: 99%
“…Relations exist for such a conversion. 10 However, the equations are sensitive to the noise in the measurements and thus cannot be used for our data. To solve this problem, we developed a simpler conversion based on the relation between the rms roughness and the PSD function for the 1-D and the 2-D isotropic cases:…”
Section: Calculation Of the Power Spectral Density Function And The Rmentioning
confidence: 99%
“…More useful statistics can be extracted by computing the periodogram estimator of the surface power spectral density (PSD) function and summing over any desired range of spatial frequencies. [3,4] This method allows one to separate high frequency roughness from low and midspatial frequency roughness and enables one to have a much better understanding of the nature of the surface. Essential to the calculation of the PSD is detrending to remove the global surface figure terms and the use of a window function in the spatial domain to minimize spectral leakage of edge discontinuities that produce artifacts in the spectrum.…”
Section: The Methodsmentioning
confidence: 99%
“…The early optical profiling instruments utilized linear array sensors that also produced a measurement over a linear trace [2]. Processing techniques were developed for the linear profile data to avoid introducing artifacts that would mask the true statistical nature of the surface [3,4]. Most surface profiling instruments today utilize 2D array cameras that produce areal surface height maps.…”
mentioning
confidence: 99%
“…Both models make use of a modified version of the ABC model [CTL90,CT91], which was originally formulated to fit the Power Spectral Density of some measured smooth surfaces. The PSD describes the surface statistics in terms of the spacial frequencies fx and fy, which depend on the wavelength λ of the incident light:…”
Section: Physically Based Modelsmentioning
confidence: 99%
“…(31) The ABC model [CTL90,CT91] is able to model the inverse power law shape PSD of polished data, and it is given by: …”
Section: Physically Based Modelsmentioning
confidence: 99%