&lt;title&gt;Noise analysis and a comparative study of noise in MEMS and MOEMS&lt;/title&gt;

Selvarajan, A.; Anand, S. K.

doi:10.1117/12.354293

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Capacitive Pressure Sensor1

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2003

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“…Apart from the usual thermal and shot noise terms in the case of MEMS it is the noise due to Brownian motion that will set the fundamental limit for ultra sensitive pressure sensors. To obtain quantitative results about the fluctuating noise pressure, the Brownian motion is treated as an ergodic random process and the mean square deflection is obtained through a Fourier transform of the autocorrelation function 1,25 .…”

Section: Capacitive Pressure Sensormentioning

confidence: 99%

Noise: How important is it in the applications of MEMS and MOEMS?

Selvarajan

2003

SPIE Proceedings

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There are various types of noise sources such as shot noise, thermal noise and flicker noise in electronic devices, quantum noise in photonic devices and noise due to Brownian motion in the case of MEMS which limit the performance of the systems based on these devices. In communication applications, noise causes degradation in SNR or BER leading to loss or errors in the received signal. In the case of sensor systems, noise poses a problem in terms of the minimum detectable quantity such as pressure or rotation rate or radiation field. In this paper first an overview of noise sources, noise modeling and analysis is given. Simulation results for some specific MOEM devices are presented. A comparative study of the performance of MEMS versus MOEMS for the same or similar application is also highlighted.

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Section: Capacitive Pressure Sensormentioning

confidence: 99%

Noise: How important is it in the applications of MEMS and MOEMS?

Selvarajan

2003

SPIE Proceedings

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show abstract

<title>Noise analysis and a comparative study of noise in MEMS and MOEMS</title>

Cited by 1 publication

References 2 publications

Noise: How important is it in the applications of MEMS and MOEMS?

Noise: How important is it in the applications of MEMS and MOEMS?

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