&lt;title&gt;MORI&lt;formula&gt;&lt;sup&gt;&lt;roman&gt;TM&lt;/roman&gt;&lt;/sup&gt;&lt;/formula&gt; high-density rf plasma source etching of polysilicon and metal films on wafers&lt;/title&gt;

Campbell, G. A.; Chambrier, Alexis de; Mendoza, Frank; Parker, N. W.; Pearson, David; Tokunaga, Ken; Tsukada, Tsutomu; Mashiro, Supika; Nogami, Hiroshi

doi:10.1117/12.142916

Cited by 5 publications

(2 citation statements)

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“…Pure helices without end-rings have been used by Kim et al [35], who have also tried straight antennas [34]. In industry, symmetric antennas have been developed and marketed successfully [94], [95], [60]. Single-and double-loop antennas have been investigated by Jiwari et al [28].…”

Section: Antenna Couplingmentioning

confidence: 99%

Helicons-the past decade

Chen¹,

Boswell

1997

IEEE Trans. Plasma Sci.

305

178

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First observed in gaseous plasmas in the early 1960's, helicon discharges lay like a sleeping giant until they emerged in the 1980's, when their usefulness as efficient plasma sources for processing microelectronic circuits for the burgeoning semiconductor industry became recognized. Research on helicons spread to many countries; new, challenging, unexpected problems arose, and these have spawned solutions and novel insights into the physical mechanisms in magnetized radio-frequency discharges. Among the most baffling puzzles were the reason for the high ionization efficiency of helicon discharges and the dominance of the right-hand polarized mode over the left-hand one. The most recent results indicate that a nonobvious resolution of these problems is at hand.

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Section: Antenna Couplingmentioning

confidence: 99%

Helicons-the past decade

Chen¹,

Boswell

1997

IEEE Trans. Plasma Sci.

305

178

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“…Helicon waves have demonstrated the capability to efficiently create and maintain highly ionized plasmas. For this reason, they are being investigated as possible plasma processing sources [1,2], particle accelerators [3] and as high density sources for space plasma research. One feature of these discharges is the high degree of ionization.…”

Section: Introductionmentioning

confidence: 99%

Neutral pumping in a helicon discharge

Gilland

Breun

Hershkowitz

1998

Plasma Sources Sci. Technol.

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At powers of 500-800 W of 13.56 MHz rf power in a 1 kG axial magnetic field, the neutral pressure in the bulk of a helicon discharge with electron densities of ∼10 13 cm −3 and electron temperatures of ∼3 eV in argon decreased by a factor of ten compared to the pressure before the discharge. These experimental results are compared with a simple axial diffusion model of ionization and neutral transport and agree qualitatively with calculated axial profiles of neutral pressure. The effects of cusped fields on neutral density profiles and plasma confinement are also examined.

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