During the last decade, there has been significant progress toward a supervised autonomous robotic capability for remotely controlled scientific exploration of planetary surfaces. While planetary exploration potentially encompasses many elements ranging from orbital remote sensing to subsurface drilling, the surface robotics element is particularly important to advancing in situ science objectives. Surface activities include a direct characterization of geology, mineralogy, atmosphere and other descriptors of current and historical planetary processes-and ultimately-the return of pristine samples to Earth for detailed analysis. Toward these ends, we have conducted a broad program of research on robotic systems for scientific exploration of the Mars surface, with minimal remote intervention. The goal is to enable high productivity semi-autonomous science operations where available mission time is concentrated on robotic operations, rather than up-and-down-link delays. Results of our work include prototypes for landed manipulators, long-ranging science rovers, sampling/sample return mobility systems, and more recently, terrain-adaptive reconfigurable/modular robots and closely cooperating multiple rover systems. The last of these are intended to facilitate deployment of planetary robotic outposts for an eventual human-robot sustained scientific presence. We overview our progress in these related areas of planetary robotics R&D, spanning 1995-to-present.