2000
DOI: 10.1117/12.411723
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<title>Micromachined SiC fiber optic pressure sensors for high-temperature aerospace applications</title>

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Cited by 41 publications
(29 citation statements)
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“…Fiber-optic interferometers, especially fiber FabryPerot interferometers ͑FFPI͒, have found increased applications in the past decade for the detection and measurement of a large variety of physical parameters, such as temperature, [1][2][3][4] vibration, 1,5 pressure, 3,4,6,7 acoustic waves, 1,5,8 -11 and strain. 12,13 Many interferometric sensors operate over the linear region of an interference fringe.…”
Section: Introductionmentioning
confidence: 99%
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“…Fiber-optic interferometers, especially fiber FabryPerot interferometers ͑FFPI͒, have found increased applications in the past decade for the detection and measurement of a large variety of physical parameters, such as temperature, [1][2][3][4] vibration, 1,5 pressure, 3,4,6,7 acoustic waves, 1,5,8 -11 and strain. 12,13 Many interferometric sensors operate over the linear region of an interference fringe.…”
Section: Introductionmentioning
confidence: 99%
“…However, confining the operation to the linear region places difficult manufacturing constraints on the sensor head by requiring that the initial cavity length be positioned at the Q point or sometimes at one end of a linear region of the transfer function. 6 The sensors also suffer from signal fading caused by environmental perturbations, such as temperature changes, which may drive the sensors out of the linear region. The drifts are even more critical for Fabry-Perot ͑F-P͒ sensors; medium-or high-finesse F-P cavities are often necessary for higher measurement sensitivity 1,11 because of their steeper fringe slopes.…”
Section: Introductionmentioning
confidence: 99%
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“…However, the PD detection system does suffer from source power fluctuation caused by backreflection, initial quadrature-point ͑Q-point͒ offset because of fabrication tolerance, operating-point drift caused by static pressure in the transformer oil, and temperature drift. Although demodulation by multiwavelength interrogation 14,22 or spectral interrogation 22 is successful in solving the nonlinear transfer function, directional ambiguity, and signal fading, neither approach is suitable for PD detection because it is possible that all channels of the multiwavelength approach are not at the Q point and that neither method may have enough frequency response for PD detection.…”
Section: Introductionmentioning
confidence: 99%
“…However, small fluctuations of background pressure could change the operating point of the sensor in an unpredictable way. Several approaches, such as multiwavelength interrogation 4,5 or spectral interrogation 5 and Q-point control using a bandpass filter, 3 have been employed to compensate the operating point drift, while the price is a significant increase in system complexity and cost. In this letter, we present a new structure for diaphragm-based EFPI optical fiber sensors to eliminate operating point dependence on background pressure fluctuations.…”
Section: Introductionmentioning
confidence: 99%