<title>Micromachined infrared detectors based on pyroelectric thin films</title>

Real-time studies of ferroelectric domain switching: a review

“…A wide spectrum of functional properties have been found in ferroelectric materials, including strong electromechanical coupling, high non-linear optical activity, pyroelectricity, and non-linear dielectric behavior [3,[5][6][7][8]. These properties have made ferroelectric materials useful in a variety of electronic, optical, and electromechanical devices, such as ferroelectric varactors [9][10][11], infrared detectors [12][13][14], microwave phase filters [15][16][17][18], and piezoelectric microsensors and micromotors [19][20][21][22]. Most importantly, due to the ease of conversion between two or more stable polarization states by applying an electric field, ferroelectric materials can be utilized in an important class of high-density and nonvolatile memories [6,[23][24][25][26][27].…”

Pyroelectric Materials and Devices

“…Polla [53] and Polla et aZ. [54] have integrated sol gel PbTi0 3 films with a CMOS processing line and have fired the films at 700°C to obtain p = 8x 1 0-4 C m -2 K-1 and F D = 8x 10-5 Pa-I12 • In this case the films are on thin ShN4 membranes which are mechanically freed by a micromachining process and there is some evidence that there may be a strong secondary contribution to the pyroelectric current through flexing of the substrate, or even a light-induced contribution to the pyroelectric effect. The best films on PtlTilSi substrates are all polycrystalline, but tend to be strongly (111) orientated.…”