<title>Microfabricated voltammetric sensors for trace metal analysis</title>

Gel‐Integrated Voltammetric Microsensors and Submersible Probes as Reliable Tools for Environmental Trace Metal Analysis and Speciation

“…The microtechnology permits automatic mass production of low cost microelectrode arrays (e.g., Sec. 3.1), providing a wide flexibility in the choice of electrode material and geometry [22]. Microtechnology is also the only way to produce arrays of individually addressable microelectrodes with interdistances at the 10 -100 mm level (e.g., Sec.…”

“…3) [25]. These microsensors are produced under systematic, well-controlled steps and conditions by means of thin-film technology [22] involving: successive deposition, on standard silicon wafer, of 2000 thick Si 3 N 4 , Ir, Si 3 N 4 layers; photolithographic patterning of the Si 3 N 4 top layer to define the interconnected Ir microelectrode array, the individually addressable lines, and the bonding pad; deposition and patterning of a 300 mm thick Epon SU-8 containment ring around the individual devices; mounting and wire bonding of the individual devices on a printed circuit board (PCB); encapsulation with epoxy resin. Before use, the Epon SU-8 containment ring is filled with a 1.5% LGL agarose gel.…”