<title>Micro-optical beam deflectors and modulators: present state of development</title>

Abstract

The utilization of microoptical components in systems for optical beam deflection and modulation offers the possibility for realization of miniaturized switches and scanners. As the required displacement of the microoptical components for efficient beam manipulation is quite small, high speed actuators with small electrical power consumption can be used. We present a variety of microoptical configurations and discuss their potential for the creation of different types of miniaturized scanners, switches and modulators. First experimental results and even prototypes of modulators and switches have been achieved, indicating that the combination of microoptical components already available and semiclassical piezoelectric actuators leads to new types of switching and modulation systems for a very broad spectrum of applications.