<title>MEMS synthesis and optimization</title>

Review of Automated Design and Optimization of MEMS

“…An automated approach to generate novel MEMS accelerometer configurations was proposed by Campbell [38]. A synthesis tool for the layout design of complex or arrayed MEM devices (systems that consists of a number of similar components or devices) is proposed by Juneidi [39]. In order to use such tool, the method requires that designers model topologies of MEM devices composing the arrays first.…”

Research of Synthetical Optimization Design System of Micro-components Based on RST and GA

“…Currently, because of the severe absence of experience and formulae, the research on optimal design for micro-components is mainly limited to the analysis and the modification of the individual parameter of micro-components or the provision in the computational environments for optimization of MEMS. For example, M. Shavezipur in University of Waterloo in Canada presented a design optimization for MEMS tunable capacitors to maximize the production yield [1] ; P. Schneider in Fraunhofer Institute of Integrated Circuit in Germany put forward a module-based approach for simulationbased optimization of MEMS [2] ; Z. Juneidi in University of Pittsburgh in USA developed the software for MEMS synthesis and optimization [3] ; S.E. Lyshevski in Purdue University in USA mainly studied the integrated structures, modules and control mechanisms of MEMS [4] into a design optimization procedure [6] ; H.li in National University of Singapore presented a variation of local point interpolation method for meshless analysis of MEMS devices and proved it was very efficient and accurate [7] .…”