2002
DOI: 10.1117/12.475160
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<title>Mechanical properties of dielectric elastomer actuators with smart metallic compliant electrodes</title>

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Cited by 76 publications
(65 citation statements)
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“…6 Corrugated metal films are also opaque and have relatively small stretchability. 17 Carbon nanotubes, silver nanowires and graphene sheets exhibit considerable conductivity, but limited stretchability and transmittance. 14,[18][19][20] Whereas making highly stretchable and transparent electronic conductors has been challenging, a recent work has reported dielectric elastomer transducers using hydrogels as stretchable, transparent, ionic conductors.…”
Section: Introductionmentioning
confidence: 99%
“…6 Corrugated metal films are also opaque and have relatively small stretchability. 17 Carbon nanotubes, silver nanowires and graphene sheets exhibit considerable conductivity, but limited stretchability and transmittance. 14,[18][19][20] Whereas making highly stretchable and transparent electronic conductors has been challenging, a recent work has reported dielectric elastomer transducers using hydrogels as stretchable, transparent, ionic conductors.…”
Section: Introductionmentioning
confidence: 99%
“…One membrane was activated, and the other acted as a counter-balancing spring. The actuation signal was 2.5 kV at 30 Hz, and more than 3 million cycles were demonstrated without change in the actuation strain or damage to the electrodes [58]. This technology has been developed by the Danfoss group in Denmark in collaboration with RISØ DTU.…”
Section: Metal Thin-film Electrodes On Corrugated Membranesmentioning
confidence: 99%
“…Metal thin-film deposition and patterning via photolithography are methods which are compatible with a microfabrication process flow, but prestretching is not, due to the need to remove the membrane from its substrate, mechanically deform it and fix it on a retaining frame. As an alternative method to mechanical or heat-induced prestretch to generate out-of-plane wavy electrodes, Benslimane et al have introduced the use of a structured dielectric elastomer membrane [58]. The silicone elastomer is applied on a mold with a quasi-sinusoidal corrugation profile.…”
Section: Metal Thin-film Electrodes On Corrugated Membranesmentioning
confidence: 99%
“…Some work has been done to construct stiffer electrodes using compatible materials. For example, Benslimane et al [3] used a silver layer of 0.11 µm on a silicone elastomer of 50 µm and Pimpin et al [4] used slit electrodes of gold to reduce the constraining effect of the stiffer electrodes. In principle, the miniaturization of the electrostatically squeezed elastomers may be expected to result in a similar performance to air-gap electrostatic actuators or multi-layer actuators.…”
Section: Introductionmentioning
confidence: 99%