1993
DOI: 10.1117/12.142089
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<title>Laser repair of flat panel displays</title>

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“…Although ITO removal via excimer laser is very e cient, there are some setbacks to the use of the system, which includes a short working distance, opacity to optical glass substrates and a relatively high investment cost [5]. Due to the opacity to glass substrates, the excimer laser beam is not able to penetrate through the glass substrate to remove the ITO.…”
Section: Introductionmentioning
confidence: 99%
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“…Although ITO removal via excimer laser is very e cient, there are some setbacks to the use of the system, which includes a short working distance, opacity to optical glass substrates and a relatively high investment cost [5]. Due to the opacity to glass substrates, the excimer laser beam is not able to penetrate through the glass substrate to remove the ITO.…”
Section: Introductionmentioning
confidence: 99%
“…Most importantly, the xenon laser beam is able to pass through liquid crystal to remove aluminium shorts or polysilicon gates without creating a permanent bubble. There is also no damaging debris created by the xenon laser [1,5].…”
Section: Introductionmentioning
confidence: 99%