&lt;title&gt;Laser direct writing of circuit elements and sensors&lt;/title&gt;

Piqué, Alberto; Chrisey, Douglas B.; Auyeung, R. C. Y.; Lakeou, S.; Chung, R.; McGill, R. Andrew; Wu, Peter; Duignan, Michael T.; Fitzgerald, James W.; Wu, Houzheng

doi:10.1117/12.352695

Cited by 22 publications

(12 citation statements)

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“…The first type of sensor devices made by LDW were chemical vapor sensors that relied on the ability of chemoselective polymers loaded with graphite particles to reversibly change its volume in the presence of vapors from a solvent (Piqué et al, 1999a;. Upon exposure, the chemoselective polymer (polyepichlrohydrin or PECH) expands increasing the average distance between its graphite particles and thus exhibiting an increase in its electrical resistance.…”

Section: Ldw Of Embedded Sensorsmentioning

confidence: 99%

Rapid Prototyping of Embedded Microelectronics by Laser Direct-Write

Piqué¹

2011

Rapid Prototyping Technology - Principles and Functional Requirements

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Section: Ldw Of Embedded Sensorsmentioning

confidence: 99%

Rapid Prototyping of Embedded Microelectronics by Laser Direct-Write

Piqué¹

2011

Rapid Prototyping Technology - Principles and Functional Requirements

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“…The transfers are performed by mixing the active, or sensitive material in a liquid vehicle to form an "ink", which is applied to the UV-transparent support to form the "ribbon" as shown in Figure 2. The specifics of the laser transfer process have been discussed elsewhere [15,16]. A focused UV laser pulse is directed through the backside of the ribbon so that the laser energy interacts with the ink at the support interface.…”

Section: Laser Direct-writementioning

confidence: 99%

Fabrication Of Mesoscale Energy Storage Systems By Laser Direct-Write

et al. 2002

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Over the last two decades, there has been a trend towards the development of smaller and more autonomous electronic devices, yet the question of how to power these microdevices with correspondingly small power sources remains. To address this problem, we employ a laser forward-transfer process in combination with ultraviolet laser micromachining, to fabricate mesoscale electrochemical power sources, such as microbatteries and micro-ultracapacitors. This direct-write laser-engineering approach enables the deposition of battery materials (hydrous ruthenium oxide, manganese oxide, lithium cobalt oxide, etc.) under ambient temperature and atmospheric conditions, resulting in films with the desired morphological and electrochemical properties. Planar and stacked cell configurations are produced and tested for their energy storage and power delivery capabilities and exhibit favorable performance in comparison to current battery technology.

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“…More recently, a new laser-based direct-write technique, called MAPLE DW, for Matrix-Assisted Pulsed-Laser Evaporation Direct-Write, has been used for the direct-write of conformal electronic devices [7][8][9][10] , phosphor materials 11 , microbatteries 12,13 and even viable biomaterials 14,15 . In this paper, the use of the MAPLE DW technique for the fabrication of temperature, biological and chemical sensors is described.…”

Section: Introductionmentioning

confidence: 99%

Direct-write of sensor devices by a laser forward transfer technique

Piqué

Weir

et al. 2002

Photon Processing in Microelectronics and Photonics

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The use of direct-write techniques in the design and manufacture of sensor devices provides a flexible approach for next generation commercial and defense sensor applications. Using a laser forward transfer technique, we have demonstrated the ability to rapidly prototype temperature, biological and chemical sensor devices. This process, known as matrix assisted pulsed laser evaporation direct-write or MAPLE DW is compatible with a broad class of materials ranging from metals and electronic ceramics to chemoselective polymers and biomaterials. Various types of miniature sensor designs have been fabricated incorporating different materials such as metals, polymers, biomaterials or composites as multilayers or discrete structures on a single substrate. The MAPLE DW process is computer controlled which allows the sensor design to be easily modified and adapted to any specific application. To illustrate the potential of this technique, a functional chemical sensor system is demonstrated by fabricating all the passive and sensor components by MAPLE DW on a polyimide substrate. Additional devices fabricated by MAPLE DW including biosensors and temperature sensors and their performance are shown to illustrate the breadth of MAPLE DW and how this technique may influence current and future sensor applications.

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<title>Laser direct writing of circuit elements and sensors</title>

Cited by 22 publications

References 0 publications

Rapid Prototyping of Embedded Microelectronics by Laser Direct-Write

Rapid Prototyping of Embedded Microelectronics by Laser Direct-Write

Fabrication Of Mesoscale Energy Storage Systems By Laser Direct-Write

Direct-write of sensor devices by a laser forward transfer technique

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