2002
DOI: 10.1117/12.478642
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<title>Laser cleaning in the process of electronic device production</title>

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Cited by 6 publications
(1 citation statement)
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“…The technique can be used for micromachining electronic devices instead of chemical procedure with quite good results [8]. …”
Section: Resultsmentioning
confidence: 99%
“…The technique can be used for micromachining electronic devices instead of chemical procedure with quite good results [8]. …”
Section: Resultsmentioning
confidence: 99%