&lt;title&gt;Investigations to assess the best accuracy attainable in accelerometer calibrations&lt;/title&gt;

Martens, Hans-Juergen von; Link, Alfred; Schlaak, Hans-Joachim; Taeubner, Angelika; Wabinski, Wolfgang; Weissenborn, Christof

doi:10.1117/12.468170

Cited by 5 publications

(4 citation statements)

References 6 publications

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“…Uncertainty evaluations for measurements using laser interferometry [ 4 ] had demonstrated that relative expanded uncertainties (k = 2) < 0.1 % can be attained, e.g., 0.028 % in a measurement of a displacement amplitude 2 µm, and 0.065 % in a measurement of an accelerometer sensitivity (magnitude) of 0.123 pC/(m/s²) at a vibration frequency of 800 Hz using the fringe-counting method. Experimental investigations [ 5 ], [ 7 ] verified such high accuracy (expanded uncertainties < 0.1 %) attainable in vibration measurements and calibrations. Figures 7, 8, 9 and 10 demonstrate that in simultaneous vibration measurements using different methods and techniques, no bias (systematic deviation) could be found between the different standard methods (Methods 1, 2 and 3) specified in [ 12 ], [ 22 ] and [ 22 ] as well.…”

Section: Measurement Ranges and Accuracy (Uncertainty) Achievable Witsupporting

confidence: 50%

“…To select the most appropriate method to compute the key KCRV and the degrees of equivalence relative to the KCRV under the given conditions of CCAUV.V-K1, five different methods were analyzed and compared which make use of weighted mean, model-based fit, (arithmetic) mean, median and maximum likelihood estimator [ 5 ], [ 13 ]. The weighted mean method is preferably used in key comparisons for various physical quantities and described in the following specifically for the vibration KC.…”

Section: Key Comparison Reference Values (Kcrv) Established In a Cipmmentioning

confidence: 99%

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Metrology of vibration measurements by laser techniques

Martens

2008

Eighth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications

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Metrology as the art of careful measurement has been understood as uniform methodology for measurements in natural sciences, covering methods for the consistent assessment of experimental data and a corpus of rules regulating application in technology and in trade and industry. The knowledge, methods and tools available for precision measurements can be exploited for measurements at any level of uncertainty in any field of science and technology. A metrological approach to the preparation, execution and evaluation (including expression of uncertainty) of measurements of translational and rotational motion quantities using laser interferometer methods and techniques will be presented. The realization and dissemination of the SI units of motion quantities (vibration and shock) have been based on laser interferometer methods specified in international documentary standards. New and upgraded ISO standards are reviewed with respect to their suitability for ensuring traceable vibration measurements and calibrations in an extended frequency range of 0.4 Hz to higher than 100 kHz. Using adequate vibration exciters to generate sufficient displacement or velocity amplitudes, the upper frequency limits of the laser interferometer methods specified in ISO 16063-11 for frequencies 10 kHz can be expanded to 100 kHz and beyond. A comparison of different methods simultaneously used for vibration measurements at 100 kHz will be demonstrated. A statistical analysis of numerous experimental results proves the highest accuracy achievable currently in vibration measurements by specific laser methods, techniques and procedures (i.e. measurement uncertainty 0.05 % at frequencies 10 kHz, 1 % up to 100 kHz).

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Section: Measurement Ranges and Accuracy (Uncertainty) Achievable Witsupporting

confidence: 50%

Section: Key Comparison Reference Values (Kcrv) Established In a Cipmmentioning

confidence: 99%

Metrology of vibration measurements by laser techniques

Martens

2008

Eighth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications

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“…The accuracy that can be claimed for a vibrometer is limited by the accuracy of the calibration process because the precision of vibrometers is such high that no oscillation-reference with sufficient accuracy exists that could be used to measure the error limit. The national metrology institute of Germany, the Physikalisch Technische Bundesanstalt, has demonstrated 0.2% accuracy for such a calibration setup [10]. Figure 3 shows the noise floor of the vibrometer measurement.…”

Section: Specifications Of the Laser-doppler Vibrometermentioning

confidence: 98%

The laser-scanning confocal vibrometer microscope

Rembe

Dräbenstedt

2005

SPIE Proceedings

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Sub-micrometer lateral resolution for the optical vibration measurement can be achieved when the scanned laser beam of a confocal microscope is the measurement beam of a heterodyne laser-Doppler vibrometer. Such a scanning system that allows vibration measurements up to 30 MHz is presented in this paper for the first time. We measured a minimum 2 / 1 e -power spot diameter of 745 nm and, therefore, the vibration analysis of sub-micrometer mechanical structures is possible with our system. We demonstrate measurements on comb-drive fingers with 2 µm diameter, the tiniest structures available for us.

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“…The photodiode cannot detect the oscillation frequency of the laser light and, thus, only the following mixing terms have to be considered for the computation ofthe detector current D 1D K[E1E2 cosfroht + (t))+ E1E3 cos(tvht + OØ )+ E2E3 cos(Ø(t)+ )1 (2) where K is the amplification of the detector. The time dependency of the phase shift (t) results from the time dependency of the optical path length generated by the oscillation of the specimen.…”

Section: Theorymentioning

confidence: 99%

Additional error sources for microscopic laser Doppler measurements

Rembe

Draebenstedt

2004

SPIE Proceedings

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Laser-Doppler Vibrometry has been proven to be an accurate method to measure vibration amplitudes with a known error budget [1]. Therefore, vibrometer technique is used to realize primary standards in vibration-amplitude measurements at national metrology institutes (e.g. Physikalisch Technische Bundesanstalt PTB in Germany) [2].However, additional error sources emerge for vibrometer measurements at microscopic structures. This paper discusses two error sources that can be neglected for usual macroscopic testing but can become important for microscopic measurements.

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<title>Investigations to assess the best accuracy attainable in accelerometer calibrations</title>

Cited by 5 publications

References 6 publications

Metrology of vibration measurements by laser techniques

Metrology of vibration measurements by laser techniques

The laser-scanning confocal vibrometer microscope

Additional error sources for microscopic laser Doppler measurements

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