&lt;title&gt;Integrated optical systems for excitation delivery and broadband detection in microfluidic electrochromatography&lt;/title&gt;

Optical properties ͑transmission and refractive index͒ and chemical structure ͑x-ray photoelectron spectroscopy͒ of a diamond-like coating ͑DLC͒ before and after focused ion beam milling ͑FIBM͒ process were investigated in this article. We find no influence of FIBM on optical properties and chemical structure of the DLC in the near-infrared region. The film can be used for optical applications. As an application example, a diffractive optical element ͑DOE͒ was directly fabricated on the film by FIBM. The measured diffraction efficiency of the DOE is 73%, which is acceptable for conventional use.

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Investigation of diffractive optical element fabricated on diamond film by use of focused ion beam direct milling

Fu¹,

Bryan²

2003

Opt. Eng.

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<title>Integrated optical systems for excitation delivery and broadband detection in microfluidic electrochromatography</title>

Cited by 4 publications

References 7 publications

Soft Lithography for Microfluidic Microelectromechanical Systems (MEMS) and Optical Devices

Soft Lithography for Microfluidic Microelectromechanical Systems (MEMS) and Optical Devices

Investigation of microfabrication of diamond-like film via focused ion beam milling

Investigation of diffractive optical element fabricated on diamond film by use of focused ion beam direct milling

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