&lt;title&gt;Influence of laser pulse duration on microstructuring of silicon surface&lt;/title&gt;

Shandybina, G. D.; Martsinovsky, G. M.; Sarnakov, S. M.

doi:10.1117/12.633680

SPIE Proceedings

2005

DOI: 10.1117/12.633680

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<title>Influence of laser pulse duration on microstructuring of silicon surface</title>

G. D. Shandybina

G. M. Martsinovsky

S. M. Sarnakov

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<title>Influence of laser pulse duration on microstructuring of silicon surface</title>

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