1981
DOI: 10.1117/12.958966
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<title>High-Precision Measurement Of Aspheric Surfaces</title>

Abstract: We report the operation of a new instrument which measures with + 5 nm precision the shape of steep aspheric surfaces. The instrument makes use of contacting probes, and its working is based on an optical differential technique. Special attention is paid to the mechanical construction, and a detailed error analysis is given.

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Cited by 4 publications
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“…In both cases, however, the proper replication conditions have to be determined by measuring the resulting aspherical surfaces and comparing them with the required shape. This is done with a stylus instrument based on an optical differential technique (6). Typical examples of the respective aspherical surfaces of a mould and the corresponding lens are shown in Figures 4a and 4b.…”
Section: Lens Designmentioning
confidence: 99%
“…In both cases, however, the proper replication conditions have to be determined by measuring the resulting aspherical surfaces and comparing them with the required shape. This is done with a stylus instrument based on an optical differential technique (6). Typical examples of the respective aspherical surfaces of a mould and the corresponding lens are shown in Figures 4a and 4b.…”
Section: Lens Designmentioning
confidence: 99%